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Fabrication and Performance Study of Uniform Thin Film Integrated Filters
Abstract
The transmission line model of a uniform rectangular thin film R-C-KR structure consisting of a dielectric layer of constant per unit shunt capacitance C sandwiched between two resistive thin films of constant per unit length resistances R and KR has been analysed using the concept of matrix parameter functions. The above filter structure has been fabricated with the help of vacuum evaporation technique and performance of the device has been studied. The effect of loading the device has also been considered. The theoretical performance of the device, evaluated with the help of a digital computer has been compared with the experimental counterpart and it has been observed that the two are in considerable agreement to each other.
